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Many books on confocal microscopy introduced imaging theories and experimental techniques in the field of life science. Unfortunately, there are few books on confocal microscopy that elaborate on aspects of industrial metrology despite confocal microscope being an essential instrument both in life science and advanced fabrications, and its earlier applications which were measurements on integrated circuit.
In term of a 3D imaging tool, confocal microscope can be appropriate for either imaging cells or the measurement of industrial artefacts. However, junior researchers and instrument users sometimes misuse imaging concepts and metrological characteristics, such as position resolution in industrial metrology and scale resolution in bio-imaging. And, metrological characteristics or influence factors in 3D measurement such as height assessment error caused by 3D coupling effect are sofar not yet identified. In this book, the authors record their practices by the working experiences on standardization and system design.
This book assumes little previous knowledge of optics, but rich experience in engineering of industrial measurements, in particular with profile metrology or areal surface topography will be very helpful to understand the theoretical concerns and value of the technological advances. It should be useful for graduate students or researchers as extended reading material, as well as microscope users alongside their handbook
Confocal microscopy and its application in China
Point spread function model
Incoherent three-dimensional optical transfer function
Decoupling criteria for three-dimensional optical microscopic measurement
Pupil filter design
Confocal axial peak extraction algorithm
Differential confocal microscopy
Medium aided scattering measurement
Scanning technology
Confocal profilometer