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Beside the speed of a digital integrated circuit, the power dissipation has always been an important issue. Power delivery to the chip and thermal management are the challenges for high performance applications. Standby time is the main aspect for mobile applications. For ideal constant field scaling, the power density would remain constant from one technology generation to the next generation. In fact, the power dissipation increases continuously. This is due to the following reasons: As the performance is the main driver of technology development, ideal scaling rules have often been violated. The power density estimation mentioned above takes only dynamic losses into account. However, leakage currents show a scaling behavior inverse to dynamic losses, so the leakage power consumption is a new challenge which arises in the submicron regime. The exponential increase of leakage currents in a scaled device is an inevitable consequence of the MOSFET physics. Thus, circuit techniques are required to manage the leakage power consumption, and to avoid leakage to become a show-stopper of CMOS scaling. Several circuit techniques to reduce the leakage power consumption have been proposed in literature. Even though the principle of these techniques is simple, the devil is in the implementation details. The first challenge is to determine whether a certain technique works in a particular technology. Design rules for the low-power techniques are required to cope with the intrinsic performance penalties. This book describes common leakage reduction techniques and works out the respective dependencies on technology. Therewith, leakage reduction capability, area and performance penalties, and the scalability are discussed. Both design guidelines and circuit techniques are developed to enable an optimum implementation of the respective leakage reduction techniques. The main emphasis is on power-switch-off techniques, as they are effective against all kinds of leakage mechanisms. Novel circuit techniques are proposed and demonstrated experimentally