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Photonic integrated circuit (PIC) technology holds great potential for breaking through the bottlenecks in current photonic and optoelectronic networks. Recently, a revolution has been witnessed in the field of lithium niobate (LN) photonics. Over the past decade, nanoscale LN waveguides with a propagation loss of ~0.01 dB and a radius of curvature on the level of ~100 μm have been demonstrated. The revolution mainly benefits from two technological advancements, the maturity of lithium-niobate-on-insulator (LNOI) technology and the innovation of nanofabrication approaches of high-quality LNOI photonic structures. Using low-loss waveguides and high-quality-factor (high-Q) microresonators produced on the LNOI platform as building blocks, various integrated photonic devices have been demonstrated with unprecedented performances. The breakthroughs have reshaped the landscape of the LN industry.
This is the first monograph on LN nanophotonics enabled by the LNOI platform. It comprehensively reviews the development of fabrication technology, investigations on nonlinear optical processes, and demonstrations of electro-optical devices, as well as applications in quantum light sources, spectroscopy, sensing, and microwave-to-optical wave conversion. The book begins with an overview of the technological evolution of PICs, justifying the motivation for developing LNOI photonics. The next four chapters focus on LNOI photonics. The book concludes with a summary of the milestone achievements discussed in these chapters and provides a future perspective of this area of research.
Preface
Introduction
Fabrication Technology of Photonic Structures on Lithium-Niobate-on-Insulator
Introduction
Fabrication Technique of LNOI Wafers
Early Achievements on Lithographic Fabrication of LNOI Nanophotonic Structures
Solutions for Improving the Surface Quality with Ion Dry Etching
Solutions with FIB-Based Fabrication Techniques
Solutions with Ion Milling–Based Fabrication Techniques
Photolithography-Assisted Chemomechanical Etching Technique
Fabrication of LNOI Photonic Structures without a Lithographic Patterning LN Thin Film
Summary
Nonlinear Optics in Nanostructures Fabricated on Lithium-Niobate-on-Insulator
Introduction
Second Harmonic Generation in LNOI Photonic Structures
Modal Phase-Matched SHG
Quasi-Phase-Matched SHG
Other Second-Order Nonlinear Processes in LNOI Photonic Structures
Third-Order Nonlinear Processes in LNOI Photonic Structures
Comb Generation
Optomechanics
Summary and Future Perspectives
Integrated Electro-Optic Devices on Lithium-Niobate-on-Insulator
Introduction
Electro-Optic Tuning of LNOI Microresonators
High-Speed LNOI Modulators
Electro-Optically Tunable Nonlinear Photonic Devices
Summary and Future Perspectives
Integrated Photonics on Lithium-Niobate-on-Insulator: Toward Real-World Applications
Introduction
Optical Interfaces and Integrated Photodetectors
Integrated Electro-Optomechanical Devices
High-Sensitivity Sensors
Spectrometers
Quantum Optical Devices
Dense Photonic Integration
Summary and Future Perspectives
Summary and Future Perspectives
Index