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This book provides a comprehensive introduction to all aspects of low-energy ion–solid interaction from basic principles to advanced applications in materials science. It features a balanced and insightful approach to the fundamentals of the low-energy ion–solid surface interaction, focusing on relevant topics such as interaction potentials, kinetics of binary collisions, ion range, radiation damages, and sputtering. Additionally, the book incorporates key updates reflecting the latest relevant results of modern research on topics such as topography evolution and thin-film deposition under ion bombardment, ion beam figuring and smoothing, generation of nanostructures, and ion beam-controlled glancing angle deposition. Filling a gap of almost 20 years of relevant research activity, this book offers a wealth of information and up-to-date results for graduate students, academic researchers, and industrial scientists working in these areas.
Introduction
Fundamentals
Collision Processes
Energy Loss Processes and Ion Range
Ion Beam-Induced Damages
Sputtering
Applications
Evolution of Topography Under Low-Energy Ion Bombardment
Ion Beam Figuring and Smoothing
Low-Energy Ion Beam Bombardment-Induced Nanostructures
Ion Beam Deposition and Cleaning
Ion Beam-Assisted Deposition
Ion Beam Sputtering Induced Glancing Angle Deposition